Semi-Conductor
Epi Reactors, Rapid Thermal Heaters and Memory Disk Heaters all have been improved by re-plating with Laser Gold. ETI both fabricates from scratch or re-plates your existing reflectors on the AMT, ASM, Intevac and Moore Technology heater systems. A patented improvement in the reflector increased shape for EPI reactors has produced the ability to guarantee lamp life for one year with uniformity at the wafer.
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Applied Materials Barrel Reactor
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- Epitaxial Reactor Chamber
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Patented Compound Parabolic Reflector for AMT Epi Barrel Reactor
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Patented Compound Parabolic Reflector for AMT Epi Barrel Reactor
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- Infrared Reflector Disc Processor
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(Click Image to Enlarge) One of the most ambitious “full responsibility” program ETI has undertaken to date is this 26” diameter infrared Heat Exchanger. Some 400 Laser Gold plated electroformed light pipe reflectors were thermally fitted into stainless steel sleeves that had been laser welded between two stainless plates. The water coolant flowed around these lamp reflectors and a measurement of the difference in the temperature of the incoming water vs. the exiting water, would indicated the remarkable efficiency of the Laser Gold plating to reduce IR absorption. Although a commercial product, it was on that required aerospace manufacturing standards. It was pressure tested and Helium leak-tested to NASA specifications. Epner teamed with on trusted customer-supplier to machine and laser weld the assembly. The reflectors were installed in a chilled condition while the housing was filled with boiling fluid. This created an intimate contact between the sleeve and its insert. This “interference fit” was critical to the performance success of the product. Epner Technology, Inc. offers a refurbishment service for these lamp reflectors.
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Interior of an induction head epi-reactor
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